| (84) |
Designated Contracting States: |
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AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
| (30) |
Priority: |
18.06.2001 JP 2001183822
31.08.2001 JP 2001264368
28.12.2001 JP 2001401436
|
| (71) |
Applicant: Ebara Corporation |
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Tokyo 144-8510 (JP) |
|
| (72) |
Inventors: |
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- KOBATA, Itsukic/o Ebara Corporation
Tokyo 144-8510 (JP)
- SHIRAKASHI, Mitsuhikoc/o Ebara Corporation
Tokyo 144-8510 (JP)
- KUMEKAWA, Masayukic/o Ebara Corporation
Tokyo 144-8510 (JP)
- SAITO, Takayukic/o Ebara Research Co., Ltd.
Fujisawa-shi, Kanagawa 251-8502 (JP)
- TOMA, Yasushic/o Ebara Research Co., Ltd.
Fujisawa-shi, Kanagawa 251-8502 (JP)
- SUZUKI, Tsukuruc/o Ebara Research Co., Ltd.
Fujisawa-shi, Kanagawa 251-8502 (JP)
- YAMADA, Kaoruc/o Ebara Research Co., Ltd.
Fujisawa-shi, Kanagawa 251-8502 (JP)
- MAKITA, Yujic/o Ebara Research Co., Ltd.
Fujisawa-shi, Kanagawa 251-8502 (JP)
|
| (74) |
Representative: Wagner & Geyer |
|
Gewürzmühlstrasse 5
D-80538 München
D-80538 München (DE) |
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