(19)
(11) EP 1 400 761 A8

(12) CORRECTED EUROPEAN PATENT APPLICATION
published in accordance with Art. 158(3) EPC

(48) Corrigendum issued on:
02.06.2004 Bulletin 2004/23

(43) Date of publication:
24.03.2004 Bulletin 2004/13

(21) Application number: 02741307.9

(22) Date of filing: 26.06.2002
(51) International Patent Classification (IPC)7: F24F 7/06
(86) International application number:
PCT/JP2002/006374
(87) International publication number:
WO 2003/001122 (03.01.2003 Gazette 2003/01)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 26.06.2001 JP 2001192517
26.06.2001 JP 2001192518

(71) Applicants:
  • Nichias Co., Ltd.
    Tokyo 105-8555 (JP)
  • TOKYO ELECTRON LIMITED
    Minato-ku, Tokyo 107-8481 (JP)

(72) Inventors:
  • TERADA, I., Nichias Co. Ltd., Tsurumi Res. Lab.
    Yokohama-shi, Kanagawa 230-0053 (JP)
  • TANAKA, M., Nichias Co. Ltd., Tsurumi Res. Lab.
    Yokohama-shi, Kanagawa 230-0053 (JP)
  • MATUMURA, Y., Nichias Co. Ltd., Tsurumi Res. Lab.
    Yokohama-shi, Kanagawa 230-0053 (JP)
  • KOBAYASHI, Sadao
    Yokohama-shi, Kanagawa 247-0008 (JP)
  • MORI, Naoki, c/o TAISEI CORPORATION
    Tokyo 163-0606 (JP)
  • ITOH, Hiromu, c/o TAISEI CORPORATION
    Tokyo 163-0606 (JP)
  • WAKAYAMA, Yoshihide, c/o TAISEI CORPORATION
    Tokyo 163-0606 (JP)
  • SUENAGA, Osamu, c/o TOKYO ELECTRON LIMITED
    Nirasaki-City, Yamanashi 407-0192 (JP)

(74) Representative: Fiesser, Gerold Michael et al
Kahlhöfer Neumann Herzog Fiesser Patentanwälte Isartorplatz 8
80331 München
80331 München (DE)

   


(54) METHOD AND DEVICE FOR CLEANING AIR


(57) A method of cleaning air, comprising a humidifying step for humidifying the air containing chemical contaminants by a humidifying means and taking a part of the gaseous contaminants in the air into excessive moisture to remove the contaminants from the air and a dehumidifying step for dehumidifying the humidified air by a condensing means and taking the gaseous chemical contaminants remaining, without being removed, in the humidifying step into condensed water for removal, wherein, by using a oblique honeycomb having both front and rear faces and both upper and lower faces disposed in open state, air is led from the front opening part of the oblique honeycomb and water is fed from the upper opening part thereof to one or both of the humidifying and condensing means.