ANISOTROPIC ETCHING OF OPTICAL COMPONENTS

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EP 1 402 289 A1

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(43)	Date of publication:
	31.03.2004 Bulletin 2004/14

(21)	Application number: 02734448.0

(22)	Date of filing: 15.05.2002

(51)	International Patent Classification (IPC)⁷: G02B 5/04, G02B 6/34, H01L 33/00

(86)	International application number:
	PCT/US2002/015519

(87)	International publication number:
	WO 2002/093211 (21.11.2002 Gazette 2002/47)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

17.05.2001 US 859693
17.05.2001 US 859297
17.05.2001 US 859647
17.05.2001 US 859239
17.05.2001 US 859338
17.05.2001 US 859279
17.05.2001 US 859769
17.05.2001 US 859321
17.05.2001 US 859663
17.05.2001 US 859786
25.05.2001 US 293615 P
08.06.2001 US 297208 P
10.11.2001 US 991371

(71)	Applicant: Optronx, Inc.
	Allentown, PA 18106 (US)

(72)	Inventors:
	DELIWALA, Shrenik Orefield, PA 18069 (US) MONTGOMERY, Robert, Keith Easton, PA 18042 (US)

(74)	Representative: Suckling, Andrew Michael et al
	Marks & Clerk,4220 Nash Court,Oxford Business Park South Oxford OX4 2RU Oxford OX4 2RU (GB)

(54)	ANISOTROPIC ETCHING OF OPTICAL COMPONENTS