ATBECHDEDKESFRGBGRITLILUNLSEMCPTIESILTLVFIROMKCYALTR............................*XDIM350 (Ver 2.1 Jan 2001) 1100000/0 1710000/01402289A120040331EP02734448.02002051520031217EnEnEn85969320010517US85929720010517US85964720010517US85923920010517US85933820010517US85927920010517US85976920010517US85932120010517US85966320010517US85978620010517US293615 P20010525US297208 P20010608US99137120011110US20040331200414200403312004147 7G 02B 5/04 A 7G 02B 6/34 B 7H 01L 33/00 BdeANISOTROPES ÄTZEN OPTISCHER KOMPONENTENenANISOTROPIC ETCHING OF OPTICAL COMPONENTSfrGRAVURE ANISOTROPIQUE DE COMPOSANTS OPTIQUESOptronx, Inc.04280130AMS.P52908EP7450 Tilghman Street,Suite 105Allentown, PA 18106USDELIWALA, Shrenik5913 Ricky Ridge TrailOrefield, PA 18069USMONTGOMERY, Robert, Keith810 Howe StreetEaston, PA 18042USSuckling, Andrew Michaelet al00077593Marks & Clerk,4220 Nash Court,Oxford Business Park SouthOxford OX4 2RUGBATBECHCYDEDKESFIFRGBGRIEITLILUMCNLPTSETRALLTLVMKROSIUS200201551920020515EnWO200209321120021121200247