(19)
(11) EP 1 404 722 A1

(12)

(43) Date of publication:
07.04.2004 Bulletin 2004/15

(21) Application number: 01938762.0

(22) Date of filing: 30.05.2001
(51) International Patent Classification (IPC)7: C08F 2/52, H01J 37/32
(86) International application number:
PCT/KR2001/000907
(87) International publication number:
WO 2002/096956 (05.12.2002 Gazette 2002/49)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(71) Applicant: LG ELECTRONICS INC.
Seoul 150-721 (KR)

(72) Inventors:
  • HA, Sam-Chul
    Changwon,Kyungsangnam-Do 641-041 (KR)
  • JEONG, Young-Man
    Kimhae,Kyungsangnam-Do 621-200 (KR)
  • YOUN, Dong-Sik
    Changwon,Kyungsangnam-Do 641-170 (KR)
  • JO, Seak-Je
    Changwon,Kyungsangnam-Do 641-180 (KR)

(74) Representative: Schippan, Ralph, Dr.-Ing. 
COHAUSZ & FLORACKPatent- und RechtsanwälteBleichstrasse 14
40211 Düsseldorf
40211 Düsseldorf (DE)

   


(54) CONTINUOUS PROCESSING APPARATUS BY PLASMA POLYMERIZATION WITH VERTICAL CHAMBER