(19)

(11)

EP 1 407 220 A1

(12)

(43) Date of publication: 14.04.2004 Bulletin 2004/16 (21) Application number: 02747900.5 (22) Date of filing: 18.06.2002

(51) International Patent Classification (IPC)7: G01B 9/02 (86) International application number: PCT/US2002/018983 (87) International publication number: WO 2002/103285 (27.12.2002 Gazette 2002/52)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (30) Priority: 19.06.2001 US 883296 22.08.2001 US 934081 (71) Applicant: Nikon Corporation Tokyo 100-8331 (JP)	(72) Inventor: INOUE, Fuyuhiko San Mateo, CA 94402 (US) (74) Representative: Viering, Jentschura & Partner  Steinsdorfstrasse 6 80538 München 80538 München (DE)