ALLEVIATING LINE END SHORTENING IN TRANSISTOR ENDCAPS BY EXTENDING PHASE SHIFTERS - Patent 1410105

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EP 1 410 105 A2

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(88)	Date of publication A3:
	19.02.2004

(43)	Date of publication:
	21.04.2004 Bulletin 2004/17

(21)	Application number: 02709485.3

(22)	Date of filing: 11.02.2002

(51)	International Patent Classification (IPC)⁷: G03F 1/00, G03F 1/14, H01L 21/28

(86)	International application number:
	PCT/US2002/004119

(87)	International publication number:
	WO 2002/082182 (17.10.2002 Gazette 2002/42)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

03.04.2001 US 281325 P
31.05.2001 US 872620

(71)	Applicant: Numerical Technologies Inc.
	San Jose, CA 95134 (US)

(72)	Inventors:
	MA, Melody San Jose, CA 95135 (US) LIU, Hua-Yu Palo Alto, CA 94306 (US)

(74)	Representative: Davies, Simon Robert
	D Young & Co,21 New Fetter Lane London, EC4A 1DA London, EC4A 1DA (GB)

(54)	ALLEVIATING LINE END SHORTENING IN TRANSISTOR ENDCAPS BY EXTENDING PHASE SHIFTERS