(19)

(11)

EP 1 410 108 A2

(12)

(88) Date of publication A3: 14.06.2001 (43) Date of publication: 21.04.2004 Bulletin 2004/17 (21) Application number: 00952027.1 (22) Date of filing: 10.08.2000

(51) International Patent Classification (IPC)7: G03F 7/027 (86) International application number: PCT/KR2000/000883 (87) International publication number: WO 2001/013175 (22.02.2001 Gazette 2001/08)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 17.08.1999 KR 9933884 (71) Applicant: LG Chemical Ltd. Seoul 150-721 (KR)	(72) Inventors: AHN, Yong-Sik Kwanak-kuSeoul 151-800 (KR) KIM, Kyung-Jun Taejeon-city 305-340 (KR) HWANG, Yun-Il Seo-kuTaejeon-city 302-736 (KR) (74) Representative: Brandenburg, Thomas, Dr.  Brandenburg, Dunkelberg & FrankeLindenstrasse 1 53773 Hennef 53773 Hennef (DE)