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(11)

EP 1 410 427 A1

(12)

(43) Date of publication: 21.04.2004 Bulletin 2004/17 (21) Application number: 01944705.1 (22) Date of filing: 14.06.2001

(51) International Patent Classification (IPC)7: H01L 21/20, H01L 21/36, H01L 21/339, H01L 21/31, H01L 21/469 (86) International application number: PCT/US2001/040970 (87) International publication number: WO 2002/103767 (27.12.2002 Gazette 2002/52)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (71) Applicant: Nanodynamics, Inc. New York, NY 10021 (US)	(72) Inventors: Wang, Chia-Gee Millwood, NY 10456 (US) Tsu, Raphael Charlotte, NC 28215 (US) Lofgren, John Clay New York, NY 10021 (US) (74) Representative: Ebner von Eschenbach, Jennifer et al Ladas & Parry,Dachauerstrasse 37 80335 München 80335 München (DE)