METHOD AND APPARATUS FOR REMOVING A CARRIER PART FROM A CARRIER WITH A SINGLE OPERATION, AND A PRODUCT REMOVED FROM A CARRIER - Patent 1410434

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EP 1 410 434 A1

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(43)	Date of publication:
	21.04.2004 Bulletin 2004/17

(21)	Application number: 02741522.3

(22)	Date of filing: 08.07.2002

(51)	International Patent Classification (IPC)⁷: H01L 21/48

(86)	International application number:
	PCT/NL2002/000369

(87)	International publication number:
	WO 2003/007363 (23.01.2003 Gazette 2003/04)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR

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Priority:

11.07.2001 NL 1018511

(71)	Applicant: FICO B.V.
	6921 RW Duiven (NL)

(72)	Inventors:
	VAN DALEN, Adrianus, Wilhelmus NL-6538 NG Nijmegen (NL) VAN EGMOND, Henri, Joseph NL-6716 DN Ede (NL)

(74)	Representative: Van den Heuvel, Henricus Theodorus
	Patentwerk BVP.O. Box 1514 5200 BN 's-Hertogenbosch 5200 BN 's-Hertogenbosch (NL)

(54)	METHOD AND APPARATUS FOR REMOVING A CARRIER PART FROM A CARRIER WITH A SINGLE OPERATION, AND A PRODUCT REMOVED FROM A CARRIER