(19)

(11)

EP 1 415 343 A2

(12)

(88) Date of publication A3: 16.10.2003 (43) Date of publication: 06.05.2004 Bulletin 2004/19 (21) Application number: 02761237.3 (22) Date of filing: 06.08.2002

(51) International Patent Classification (IPC)7: H01L 23/495, H01L 23/29 (86) International application number: PCT/US2002/024789 (87) International publication number: WO 2003/015166 (20.02.2003 Gazette 2003/08)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR Designated Extension States: AL LT LV MK RO SI (30) Priority: 07.08.2001 JP 2001239204 (71) Applicant: 3M Innovative Properties Company St. Paul, MN 55133-3427 (US)	(72) Inventor: KAWATE, Kohichiro Machida-city, Tokyo 194-0041 (JP) (74) Representative: Hilleringmann, Jochen et al Bahnhofsvorplatz 1,Deichmannhaus 50667 Köln 50667 Köln (DE)