(19)
(11) EP 1 417 152 A2

(12)

(88) Date of publication A3:
12.02.2004

(43) Date of publication:
12.05.2004 Bulletin 2004/20

(21) Application number: 02763461.7

(22) Date of filing: 15.08.2002
(51) International Patent Classification (IPC)7B81C 1/00, B81C 5/00
(86) International application number:
PCT/US2002/026090
(87) International publication number:
WO 2003/016205 (27.02.2003 Gazette 2003/09)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 15.08.2001 US 312659 P

(71) Applicant: REVEO, INC.
Elmsford, NY 10523 (US)

(72) Inventor:
  • FARIS, Sadeg, M.
    Pleasantville, NY 10570 (US)

(74) Representative: Naismith, Robert Stewart et al
CRUIKSHANK & FAIRWEATHER19 Royal Exchange Square
Glasgow, G1 3AEScotland
Glasgow, G1 3AEScotland (GB)

   


(54) MEMS AND METHOD OF MANUFACTURING MEMS