(19)

(11)

EP 1 417 713 A2

(12)

(88) Date of publication A3: 11.12.2003 (43) Date of publication: 12.05.2004 Bulletin 2004/20 (21) Application number: 02798907.8 (22) Date of filing: 28.06.2002

(51) International Patent Classification (IPC)7: H01L 27/15, H01L 31/12, H01L 33/00 (86) International application number: PCT/US2002/022091 (87) International publication number: WO 2003/026082 (27.03.2003 Gazette 2003/13)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (30) Priority: 29.06.2001 US 896189 29.06.2001 US 896797 29.06.2001 US 897160 29.06.2001 US 896983 29.06.2001 US 897158 29.06.2001 US 302600 P 18.03.2002 US 365489 P 19.03.2002 US 365996 P 19.03.2002 US 366032 P 19.03.2002 US 365998 P 26.06.2002 US 180367 (71) Applicant: Xanoptix, Inc. Merrimack, NH 03054 (US)

(72) Inventor: TREZZA, John Nashua, NH 03063 (US) (74) Representative: Walaski, Jan Filip  Venner, Shipley & Co,20 Little Britain London EC1A 7DH London EC1A 7DH (GB)