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(11) | EP 1 419 864 A3 |
| (12) | EUROPEAN PATENT APPLICATION |
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| (54) | Method and reaction apparatus for treating object with gas |
| (57) There are disclosed a method and a reaction apparatus which can safely and continuously
treat/discharge especially a short object to be treated without any direct contact
with a gas atmosphere, and which surely/efficiently treats the object with a gas without
any uneven treatment. A short object A to be treated is put in a hermetically sealed
cylindrical treatment section (1). In the treatment section (1), the object is held
in a predetermined position by a first operation piece (11) to be treated with a gas
for a predetermined time. Then, the holding by the first operation piece is released
to move the object A by a desired distance. Subsequently, the object is held in a
predetermined position by a second operation piece (12) to be treated again with the
gas for a predetermined time, and then a treated object A1 is discharged. This discharged
treated object A1 is conveyed to the outside of the apparatus. |