(19)
(11) EP 1 420 079 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
23.08.2006 Bulletin 2006/34

(45) Mention of the grant of the patent:
31.05.2006 Bulletin 2006/22

(21) Application number: 03255821.5

(22) Date of filing: 17.09.2003
(51) International Patent Classification (IPC): 
C23C 16/452(2006.01)
C23C 16/509(2006.01)
 C23C 16/455(2006.01)
H01J 37/32(2006.01)

(54)

Film-forming system and film-forming method

Schicht bildendes Apparat und Verfahren

Appareil pour la formation de couches minces et procédé d'utilisation correspondant

(84) Designated Contracting States:
DE FR

(30) Priority: 17.09.2002 JP 2002269581

(43) Date of publication of application:
19.05.2004 Bulletin 2004/21

(73) Proprietor: ANELVA CORPORATION
Fuchu-shi, Tokyo 183-8508 (JP)

(72) Inventors:
  • Kumagai, Akira c/o Anelva Corporation
    Fuchu-shi Tokyo 183-8508 (JP)
  • Ishibashi, Keiji / c/o Anelva Corporation
    Fuchu-shi Tokyo 183 - 8508 (JP)
  • Tanaka, Masahiko/ c/o Anelva Corporation
    Fuchu-shi Tokyo 183 - 8508 (JP)

(74) Representative: Lyndon-Stanford, Edward W.B. 
Marks & Clerk 90 Long Acre
London WC2E 9RA
London WC2E 9RA (GB)


(56) References cited: : 
US-A1- 2001 054 382
 US-B1- 6 436 487
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).