(19)
(11) EP 1 423 868 A2

(12)

(88) Date of publication A3:
24.07.2003

(43) Date of publication:
02.06.2004 Bulletin 2004/23

(21) Application number: 02773205.6

(22) Date of filing: 15.08.2002
(51) International Patent Classification (IPC)7: H01L 21/302
(86) International application number:
PCT/US2002/026167
(87) International publication number:
WO 2003/017330 (27.02.2003 Gazette 2003/09)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 17.08.2001 US 313086 P

(71) Applicant: ACM Research, Inc.
Fremont, CA 94538 (US)

(72) Inventors:
  • YAO, Xiang, Yu
    Milpitas, CA 95035 (US)
  • CHANG, Ru, Kao
    MOuntain View, CA 94040 (US)
  • YIH, Peihaur
    Newark, CA 94560 (US)
  • WANG, Hui
    Fremont, CA 94536 (US)

(74) Representative: Vleck, Jan Montagu 
Reddie & Grose,16 Theobalds Road
London WC1X 8PL
London WC1X 8PL (GB)

   


(54) FORMING A SEMICONDUCTOR STRUCTURE USING A COMBINATION OF PLANARIZING METHODS AND ELECTROPOLISHING