(19)
(11) EP 1 425 115 A1

(12)

(43) Date of publication:
09.06.2004 Bulletin 2004/24

(21) Application number: 01927173.3

(22) Date of filing: 18.04.2001
(51) International Patent Classification (IPC)7B08B 3/00
(86) International application number:
PCT/US2001/012617
(87) International publication number:
WO 2001/078911 (25.10.2001 Gazette 2001/43)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 18.04.2000 US 197519 P
09.02.2001 US 267916 P

(71) Applicant: S. C. Fluids, Inc.
Nashua, NH 03063 (US)

(72) Inventors:
  • COSTANTINI, Michael
    Hudson, NH 03051 (US)
  • MORITZ, Heiko D
    Milford NH 03055 (US)
  • MOUNT, David
    North Andover, MA 01845 (US)
  • JAFRI, Ijaz
    Londonderry NH 03053 (US)
  • HEATHWAITE, Rick
    Manchester, NH 03103 (US)
  • CHANDRA, Mohan
    Merrimack, NH 03054 (US)

(74) Representative: Jenkins, Richard Gavin 
Loven and Co,Quantum House,30 Tentercroft Street
Lincoln LN5 7DB
Lincoln LN5 7DB (GB)

   


(54) SUPERCRITICAL FLUID DELIVERY AND RECOVERY SYSTEM FOR SEMICONDUCTOR WAFER PROCESSING