(19)
(11) EP 1 425 595 A1

(12)

(43) Date of publication:
09.06.2004 Bulletin 2004/24

(21) Application number: 01975166.8

(22) Date of filing: 14.09.2001
(51) International Patent Classification (IPC)7G01R 33/035, H01L 39/00
(86) International application number:
PCT/US2001/026024
(87) International publication number:
WO 2003/025603 (27.03.2003 Gazette 2003/13)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(71) Applicant: University of Maryland College Park
Riverdale, MD 20737 (US)

(72) Inventors:
  • WELLSTOOD, Fred
    Lanham, MD 20706 (US)
  • CHATRAPHORN, SojiphongDepartment of Physics
    Phyathai Road, Bangkok 10330 (TH)
  • FLEET, Erin
    Alexandria, VA 22314 (US)

(74) Representative: Harris, Ian Richard 
D. Young & Co.,21 New Fetter Lane
London EC4A 1DA
London EC4A 1DA (GB)

   


(54) SCANNING SQUID MICROSCOPE WITH IMPROVED SPATIAL RESOLUTION