| (84) |
Designated Contracting States: |
|
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
|
Designated Extension States: |
|
AL LT LV MK RO SI |
| (71) |
Applicant: Applied Materials, Inc. |
|
Santa Clara,California 95052 (US) |
|
| (72) |
Inventors: |
|
- MANKOS, Marian
San Francisco, CA 94115 (US)
- CHANG, Tai-Hon, Philip
Milpitas, CA 94404 (US)
- LEE, Kim, Y.
Fremont, CA 94536 (US)
- YU, Ming
Fremont, CA 94539 (US)
|
| (74) |
Representative: Bayliss, Geoffrey Cyril et al |
|
BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB) |
|
