HOMOGENIZATION OF A SPATIALLY COHERENT RADIATION BEAM AND PRINTING AND INSPECTION, RESPECTIVELY, OF A PATTERN ON A WORKPIECE - Patent 1425783

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EP 1 425 783 A1

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(43)	Date of publication:
	09.06.2004 Bulletin 2004/24

(21)	Application number: 02768252.5

(22)	Date of filing: 09.09.2002

(51)	International Patent Classification (IPC)⁷: H01L 21/027, G03F 7/00

(86)	International application number:
	PCT/SE2002/001607

(87)	International publication number:
	WO 2003/023833 (20.03.2003 Gazette 2003/12)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

10.09.2001 SE 0103006

(71)	Applicant: MICRONIC LASER SYSTEMS AB
	S-18303 Täby (SE)

(72)	Inventors:
	SANDSTRÖM, Torbjörn S-435 43 PIXBO (SE) HOLM R, Anna-Karin S-554 46 JÖNKÖPING (SE) WILHELMSSON, Kenneth S-433 50 ÖJERSJÖ (SE)

(74)	Representative: Fritzon, Rolf et al
	Kransell & Wennborg ABP.O. Box 27834 115 93 Stockholm 115 93 Stockholm (SE)

(54)	HOMOGENIZATION OF A SPATIALLY COHERENT RADIATION BEAM AND PRINTING AND INSPECTION, RESPECTIVELY, OF A PATTERN ON A WORKPIECE