| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR |
|
Designated Extension States: |
|
AL LT LV MK RO SI |
| (30) |
Priority: |
31.08.2001 US 316562 P
|
| (71) |
Applicants: |
|
- ASM America, Inc.
Phoenix, AZ 85034-7200 (US)
- ASM Microchemistry Oy
02630 Espoo (FI)
|
|
| (72) |
Inventors: |
|
- HAUKKA, Suvi, P.
FIN-00560 Helsinki (FI)
- SHERO, Eric
Phoenix, AZ 85044 (US)
- POMAREDE, Chritophe, F.
Phoenix, AZ 85048 (US)
- HUBERT MAES, Jan, Willem
B-B-3001 Heverlee (BE)
- TUOMINEN, Marko
FIN-02600 Espoo (FI)
|
| (74) |
Representative: Fleischer, Holm Herbert, Dr. |
|
Sternagel, Fleischer, Godemeyer & PartnerPatentanwälteBraunsberger Feld 29
51429 Bergisch Gladbach
51429 Bergisch Gladbach (DE) |
|
