(19)
(11) EP 1 426 992 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
30.11.2005 Bulletin 2005/48

(43) Date of publication A2:
09.06.2004 Bulletin 2004/24

(21) Application number: 03104514.9

(22) Date of filing: 03.12.2003
(51) International Patent Classification (IPC)7: H01H 59/00
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 05.12.2002 JP 2002354041

(71) Applicant: OMRON CORPORATION
Kyoto-shi, Kyoto 600-8530 (JP)

(72) Inventors:
  • SEKI, Tomonori, c/o OMRON Corp
    Shiokoji-dori,Shimogyo-ku,Kyoto 600-8530 (JP)
  • UNO, Yutaka, c/o OMRON Corp.
    Shiokoji-dori,Shimogyo-ku,Kyoto,600-8530 (JP)
  • MASUDA, Takahiro,OMRON Corp.
    Shiokoji-dori,Shimogyo-ku,Kyoto,600-8530 (JP)

(74) Representative: Weihs, Bruno Konrad 
Osha & May 121, avenue des Champs Elysées
75008 Paris
75008 Paris (FR)

   


(54) Electrostatic mems switch


(57) A plurality of fixed contacts and signal lines are provided on a fixed substrate. A movable contact which is closed or opened with the fixed contacts is provided on a movable substrate opposed to the fixed substrate. A film thickness of the fixed contacts is made to be smaller than that of the signal lines so that the movable contact is set in a concave portion constituted by the fixed contacts when the fixed contacts, and the movable contact are closed and the signal lines are linearly connected.






Search report