REAL-TIME EVALUATION OF STRESS FIELDS AND PROPERTIES IN LINE FEATURES FORMED ON SUBSTRATES - Patent 1428242

(19)

(11)

EP 1 428 242 A2

(12)

(88)	Date of publication A3:
	25.03.2004

(43)	Date of publication:
	16.06.2004 Bulletin 2004/25

(21)	Application number: 01928921.4

(22)	Date of filing: 27.04.2001

(51)	International Patent Classification (IPC)⁷: H01L 21/00

(86)	International application number:
	PCT/US2001/013545

(87)	International publication number:
	WO 2001/082335 (01.11.2001 Gazette 2001/44)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
	Designated Extension States:
	AL LT LV MK RO

(30)

Priority:

27.04.2000 US 560719

(71)	Applicant: California Institute of Technology
	Pasadena, CA 91125 (US)

(72)	Inventors:
	SURESH, Subra,Massachusetts Inst.of Tech. Cambridge, MA 02139 (US) ROSAKIS, Ares, J. Altadena, CA 91001 (US)

(74)	Representative: Lloyd, Patrick Alexander Desmond
	Reddie & Grose16 Theobalds Road London WC1X 8PL London WC1X 8PL (GB)

(54)	REAL-TIME EVALUATION OF STRESS FIELDS AND PROPERTIES IN LINE FEATURES FORMED ON SUBSTRATES