(84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
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Designated Extension States: |
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AL LT LV MK |
(30) |
Priority: |
11.12.2002 JP 2002358832
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(71) |
Applicant: Hitachi Industries Co., Ltd. |
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Tokyo (JP) |
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(72) |
Inventors: |
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- Tanaka, Kenji, c/o Hitachi Industries Co., Ltd.
Tsuchiura-chi, Tokyo (JP)
- Ito, Toshio, c/o Hitachi Industries Co., Ltd.
Chiyoda-machi, Tokyo (JP)
- Konno, Toyoo, c/o Hitachi Industries Co., Ltd.
Tomobe-machi, Tokyo (JP)
- Orikasa, Hideaki, c/o Hitachi Industries Co., Ltd.
Chiyoda-machi, Tokyo (JP)
|
(74) |
Representative: Hano, Christian, Dipl.-Ing. et al |
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v. Füner Ebbinghaus Finck Hano Mariahilfplatz 2 & 3 81541 München 81541 München (DE) |
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