(19)

(11)

EP 1 430 163 A2

(12)

(88) Date of publication A3: 25.03.2004 (43) Date of publication: 23.06.2004 Bulletin 2004/26 (21) Application number: 02800002.4 (22) Date of filing: 15.08.2002

(51) International Patent Classification (IPC)7: C23C 18/16, B01D 61/14, C02F 1/44 (86) International application number: PCT/EP2002/009125 (87) International publication number: WO 2003/029518 (10.04.2003 Gazette 2003/15)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR Designated Extension States: AL LT LV MK RO SI (30) Priority: 26.09.2001 DE 10148632 (71) Applicant: ATOTECH Deutschland GmbH 10553 Berlin (DE)	(72) Inventors: HAHNDORF, Ina 10999 Berlin (DE) KOSTOUROS, Demitry 91094 Langensendelbach (DE) (74) Representative: Bressel, Burkhard, Dr.  Effert, Bressel und Kollegen,Patentanwälte,Radickestrasse 48 12489 Berlin (Adlershof) 12489 Berlin (Adlershof) (DE)