(19)

(11)

EP 1 433 202 A2

(12)

(88) Date of publication A3: 12.09.2003 (43) Date of publication: 30.06.2004 Bulletin 2004/27 (21) Application number: 02757668.5 (22) Date of filing: 09.09.2002

(51) International Patent Classification (IPC)7: H01L 21/768 (86) International application number: PCT/US2002/028715 (87) International publication number: WO 2003/028090 (03.04.2003 Gazette 2003/14)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR (30) Priority: 26.09.2001 US 965370 26.09.2001 US 965373 26.09.2001 US 965369 (71) Applicant: Applied Materials Inc. Santa Clara, CA 95054 (US)	(72) Inventors: CHUNG, Hua San Jose, CA 95129 (US) CHEN, Ling Sunnyvale, CA 94087 (US) YU, Jick San Jose, CA 95129 (US) CHANG, Mei Saratoga, CA 95070 (US) (74) Representative: Setna, Rohan P. et al Boult Wade TennantVerulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)