(19)
(11) EP 1 433 205 A1

(12)

(43) Date of publication:
30.06.2004 Bulletin 2004/27

(21) Application number: 01274520.4

(22) Date of filing: 01.10.2001
(51) International Patent Classification (IPC)7: H01L 27/115, H01L 21/8247
(86) International application number:
PCT/EP2001/011344
(87) International publication number:
WO 2003/030261 (10.04.2003 Gazette 2003/15)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(71) Applicant: Infineon Technologies AG
81669 München (DE)

(72) Inventors:
  • ATTI, Massimo
    81369 München (DE)
  • DEML, Christoph
    81735 München (DE)

(74) Representative: Reinhard - Skuhra - Weise & Partner 
Friedrichstrasse 31
80801 München
80801 München (DE)

   


(54) SEMICONDUCTOR MEMORY DEVICE AND CORRESPONDING MANUFACTURING METHOD