(19)
(11) EP 1 435 108 A1

(12)

(43) Date of publication:
07.07.2004 Bulletin 2004/28

(21) Application number: 02746173.0

(22) Date of filing: 05.07.2002
(51) International Patent Classification (IPC)7H01L 21/3065
(86) International application number:
PCT/KR2002/001273
(87) International publication number:
WO 2003/007358 (23.01.2003 Gazette 2003/04)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR

(30) Priority: 09.07.2001 KR 2001040786

(71) Applicants:
  • Park, Hee-Kook
    135-240 Seoul (KR)
  • Bae, Kyung-Bin
    Pyungtaek-City,Kyunggi-Do 459-825 (KR)
  • ANS Co., Ltd.
    Pyungtaek-City, Kyunggi-Do 459-040 (KR)

(72) Inventor:
  • The designation of the inventor has not yet been filed
     ()

(74) Representative: Hirsz, Christopher Stanislaw et al
Hepworth Lawrence Bryer & BizleyMerlin HouseFalconry CourtBaker's Lane
Epping,Essex CM16 5DQ
Epping,Essex CM16 5DQ (GB)

   


(54) PLASMA REACTOR FOR MANUFACTURING ELECTRONIC COMPONENTS