| (84) |
Designated Contracting States: |
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DE FR GB NL |
| (30) |
Priority: |
12.10.2001 JP 2001315548 06.12.2001 JP 2001372734 28.12.2001 JP 2001399269
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| (43) |
Date of publication of application: |
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07.07.2004 Bulletin 2004/28 |
| (73) |
Proprietor: Ebara Engineering Service Co., Ltd. |
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Tokyo
144-8610 (JP) |
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| (72) |
Inventors: |
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- SHIMAMURA, Kazuaki
Kamakura-shi, Kanagawa 247-0061 (JP)
- TANAKA, Toshihiro
Fujisawa-shi, Kanagawa 251-0015 (JP)
- MIURA, Yukiko
Fujisawa-shi, Kanagawa 251-0016 (JP)
- KATAOKA, Katsuyuki
Chigasaki-shi, Kanagawa 253-0006 (JP)
- ISHIKAWA, Hideyuki
Ohta-ku, Tokyo 145-0072 (JP)
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| (74) |
Representative: Wagner, Karl H. |
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Wagner & Geyer Partnerschaft
Patent- und Rechtsanwälte
Gewürzmühlstrasse 5 80538 München 80538 München (DE) |
| (56) |
References cited: :
JP-A- 1 033 098 JP-A- 11 309 464 JP-B1- 31 007 160
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JP-A- 10 323 677 JP-B1- 31 005 367 US-A- 4 338 109
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