(19)

(11)

EP 1 436 835 A2

(12)

(88) Date of publication A3: 24.07.2003 (43) Date of publication: 14.07.2004 Bulletin 2004/29 (21) Application number: 01988123.4 (22) Date of filing: 18.10.2001

(51) International Patent Classification (IPC)7: H01L 23/373, B22F 3/10, B22F 3/11 (86) International application number: PCT/US2001/032544 (87) International publication number: WO 2003/041165 (15.05.2003 Gazette 2003/20)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (71) Applicant: Honeywell International, Inc. Morristown, New Jersey 07962 (US)	(72) Inventor: RASIAH, Ignatius J. Singapore, SG 268817 (SG) (74) Representative: Hucker, Charlotte Jane  Gill Jennings & EveryBroadgate House,7 Eldon Street London EC2M 7LH London EC2M 7LH (GB)