| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR |
|
Designated Extension States: |
|
AL LT LV MK RO SI |
| (30) |
Priority: |
13.09.2001 US 953026
21.02.2002 US 81589
22.03.2002 US 104502
|
| (71) |
Applicant: Cymer, Inc. |
|
San Diego, CA 92127 (US) |
|
| (72) |
Inventors: |
|
- MORTON, Richard, G.
San Diego, CA 92127 (US)
- DYER, Timothy, S.
Oceanside, CA 92056 (US)
- STEIGER, Thomas, D.
San Diego, CA 92128 (US)
- UJAZDOWSKI, Richard, C.
Poway, CA 92064 (US)
- WATSON, Tom, A.
Carlsbad, CA 92008 (US)
- MOOSMAN, Bryan
San Diego, CA 92130 (US)
- IVASCHENKO, Alex, P.
San Diego, CA 92122 (US)
- GILLESPIE, Walter, D
Poway, CA 92064 (US)
- RETTIG, Curtis, L.
Vista, CA 92083 (US)
|
| (74) |
Representative: Grünecker, Kinkeldey, Stockmair & SchwanhäusserAnwaltssozietät |
|
Maximilianstrasse 58
80538 München
80538 München (DE) |
|
