(19)
(11) EP 1 438 256 A2

(12)

(88) Date of publication A3:
20.11.2003

(43) Date of publication:
21.07.2004 Bulletin 2004/30

(21) Application number: 02780484.8

(22) Date of filing: 21.10.2002
(51) International Patent Classification (IPC)7B81B 3/00
(86) International application number:
PCT/US2002/033351
(87) International publication number:
WO 2003/036737 (01.05.2003 Gazette 2003/18)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 22.10.2001 US 330433 P

(71) Applicant: Montana State University-Bozeman
Bozeman, MT 59717 (US)

(72) Inventors:
  • DICKENSHEETS, David L.
    Bozeman, MT 59715 (US)
  • KAISER, Todd J.
    Bozeman, MT 59715 (US)
  • HIMMER, Philip A.
    Bozeman, MT 59715 (US)
  • LUTZENBERGER, Jeffrey
    Bozeman, MT 59718 (US)
  • FRIHOLM, Robert A.
    Beaverton, OR 97006 (US)

(74) Representative: Holt, Daniel Richard et al
Mewburn Ellis LLPYork House23 Kingsway
London WC2B 6HP
London WC2B 6HP (GB)

   


(54) STIFFENED SURFACE MICROMACHINED STRUCTURES AND PROCESS FOR FABRICATING THE SAME