(19)

(11)

EP 1 438 448 A1

(12)

(43) Date of publication: 21.07.2004 Bulletin 2004/30 (21) Application number: 01981784.0 (22) Date of filing: 23.10.2001

(51) International Patent Classification (IPC)7: C25F 5/00 (86) International application number: PCT/US2001/032607 (87) International publication number: WO 2003/035944 (01.05.2003 Gazette 2003/18)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR (71) Applicant: Atotech Deutschland GmbH 10507 Berlin (DE)	(72) Inventor: Coffey,Barry W. Lenoir, NC 28645 (US) (74) Representative: Jacob, Reuben Ellis et al R G C Jenkins & Co.,26 Caxton Street London SW1H 0RJ London SW1H 0RJ (GB)