(19)
(11) EP 1 440 178 A1

(12)

(43) Date of publication:
28.07.2004 Bulletin 2004/31

(21) Application number: 02788542.5

(22) Date of filing: 29.10.2002
(51) International Patent Classification (IPC)7C23C 14/56, C23C 14/24
(86) International application number:
PCT/IT2002/000687
(87) International publication number:
WO 2003/038142 (08.05.2003 Gazette 2003/19)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 02.11.2001 IT FI20010205

(71) Applicant: Galileo Vacuum Systems S.R.L.
59100 Prato (IT)

(72) Inventors:
  • FUSI, Andrea
    I-50136 Firenze (IT)
  • CENI, Mario
    I-50018 Scandicci (IT)

(74) Representative: Mannucci, Michele et al
Ufficio Tecnico Ing.A. Mannucci S.R.L,Via della Scala 4
50123 Firenze
50123 Firenze (IT)

   


(54) APPARATUS FOR VACUUM DEPOSITION, SPECIFICALLY FOR METALLIZING PLASTIC FILM