(19)
(11) EP 1 440 459 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
30.05.2007 Bulletin 2007/22

(45) Mention of the grant of the patent:
11.04.2007 Bulletin 2007/15

(21) Application number: 02800444.8

(22) Date of filing: 03.10.2002
(51) International Patent Classification (IPC): 
H01L 21/00(2006.01)
G03F 7/00(2006.01)
 B05C 11/02(2006.01)
(86) International application number:
PCT/US2002/031459
(87) International publication number:
WO 2003/030228 (10.04.2003 Gazette 2003/15)

(54)

METHOD AND APPARATUS FOR MITIGATING CROSS-CONTAMINATION BETWEEN LIQUID DISPENSING JETS IN CLOSE PROXIMITY TO A SURFACE

VERFAHREN UND VORRICHTUNG ZUR VERMEIDUNG VON KREUZ-KONTAMINATION ZWISCHEN FLÜSSIGKEITSDÜSEN INOBERFLÄCHENNÄHE

TECHNIQUE PERMETTANT DE REDUIRE LA CONTAMINATION CROISEE ENTRE DES JETS DISTRIBUTEURS DE LIQUIDE A PROXIMITE D'UNE SURFACE ET APPAREIL A CET EFFET

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR

(30) Priority: 03.10.2001 US 327055 P

(43) Date of publication of application:
28.07.2004 Bulletin 2004/31

(73) Proprietor: ASML US, Inc.
San Jose, CA 95131-1716 (US)

(72) Inventor:
  • NGUYEN, Andrew
    Santa Clara, CA 95054 (US)

(74) Representative: Asquith, Julian Peter 
Marks & Clerk, Nash Court, Oxford Business Park South
Oxfordshire OX4 2RU
Oxfordshire OX4 2RU (GB)


(56) References cited: : 
WO-A-00/16163
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).