(19)
(11) EP 1 442 330 A1

(12)

(43) Date of publication:
04.08.2004 Bulletin 2004/32

(21) Application number: 02785265.6

(22) Date of filing: 22.10.2002
(51) International Patent Classification (IPC)7: G02B 7/182, G02B 6/08, G02B 5/09
(86) International application number:
PCT/EP2002/011773
(87) International publication number:
WO 2003/040796 (15.05.2003 Gazette 2003/20)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 09.11.2001 DE 10155261

(71) Applicant: Carl Zeiss SMT AG
73447 Oberkochen (DE)

(72) Inventors:
  • SINGER, Wolfgang
    73431 Aalen (DE)
  • WEISS, Markus
    73430 Aalen (DE)
  • SEIFERT, Andreas
    73434 Aalen (DE)
  • MELZER, Frank
    73469 Utzmemmingen (DE)
  • MANN, Heinz
    73431 Aalen (DE)

(74) Representative: Lorenz, Werner, Dr.-Ing. 
Lorenz & Kollegen,Alte Ulmer Strasse 2
89522 Heidenheim
89522 Heidenheim (DE)

   


(54) TILTING MIRROR