| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR |
|
Designated Extension States: |
|
AL LT LV MK RO SI |
| (30) |
Priority: |
23.10.2001 US 46359
14.06.2002 US 171758
|
| (71) |
Applicant: Brooks-Pri Automation, Inc. |
|
Billerica, MA 01821 (US) |
|
| (72) |
Inventors: |
|
- EDWARDS, Keith, A.
Austin, TX 78750 (US)
- ZOU. Jianping
Austin, Texas 78759 (US)
- MULLINS, James, A.
Round Rock, TX 78681 (US)
|
| (74) |
Representative: Wolff, Felix, Dr. et al |
|
Kutzenberger & WolffTheodor-Heuss-Ring 23
50668 Köln
50668 Köln (DE) |
|
