A METHOD FOR MOLDING A POLYMER SURFACE THAT REDUCES PARTICLE GENERATION AND SURFACE ADHESION FORCES WHILE MAINTAINING A HIGH HEAT TRANSFER COEFFICIENT - Patent 1444716

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EP 1 444 716 A2

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(88)	Date of publication A3:
	06.11.2003

(43)	Date of publication:
	11.08.2004 Bulletin 2004/33

(21)	Application number: 02802866.0

(22)	Date of filing: 07.11.2002

(51)	International Patent Classification (IPC)⁷: H01J 37/317, H01L 21/00

(86)	International application number:
	PCT/US2002/035667

(87)	International publication number:
	WO 2003/041110 (15.05.2003 Gazette 2003/20)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

07.11.2001 US 45363

(71)	Applicant: Axcelis Technologies Inc.
	Beverly, MA 01915-1053 (US)

(72)	Inventor:
	LAGOS, Bryan Danvers, MA 01923 (US)

(74)	Representative: Burke, Steven David et al
	R.G.C. Jenkins & Co.26 Caxton Street London SW1H 0RJ London SW1H 0RJ (GB)

(54)	A METHOD FOR MOLDING A POLYMER SURFACE THAT REDUCES PARTICLE GENERATION AND SURFACE ADHESION FORCES WHILE MAINTAINING A HIGH HEAT TRANSFER COEFFICIENT