(19)
(11) EP 1 446 657 A2

(12)

(88) Date of publication A3:
08.01.2004

(43) Date of publication:
18.08.2004 Bulletin 2004/34

(21) Application number: 02789470.8

(22) Date of filing: 07.11.2002
(51) International Patent Classification (IPC)7G01N 21/95, G01N 21/956
(86) International application number:
PCT/US2002/035640
(87) International publication number:
WO 2003/040709 (15.05.2003 Gazette 2003/20)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 07.11.2001 US 986138

(71) Applicant: Applied Materials, Inc.
Santa Clara,California 95054 (US)

(72) Inventors:
  • ALMOGY, Gilad
    53257 Givatayim (IL)
  • RECHES, Oren
    42823 Zoran (IL)

(74) Representative: Bayliss, Geoffrey Cyril et al
BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB)

   


(54) SPOT GRID ARRAY IMAGING SYSTEM