(19)
(11) EP 1 453 991 A1

(12)

(43) Date of publication:
08.09.2004 Bulletin 2004/37

(21) Application number: 02788797.5

(22) Date of filing: 11.12.2002
(51) International Patent Classification (IPC)7: C25F 3/00, C25F 7/00, B23H 3/02, H01L 21/3063
(86) International application number:
PCT/JP2002/012973
(87) International publication number:
WO 2003/054255 (03.07.2003 Gazette 2003/27)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SI SK TR

(30) Priority: 13.12.2001 JP 2001380641
12.03.2002 JP 2002067393

(71) Applicant: EBARA CORPORATION
Ohta-ku,Tokyo 144-8510 (JP)

(72) Inventors:
  • SHIRAKASHI, Mitsuhiko
    Ohta-ku, Tokyo 144-8510 (JP)
  • KUMEKAWA, Masayuki
    Ohta-ku, Tokyo 144-8510 (JP)
  • YASUDA, Hozumi
    Ohta-ku, Tokyo 144-8510 (JP)
  • KOBATA, Itsuki
    Ohta-ku, Tokyo 144-8510 (JP)

(74) Representative: Wagner, Karl H., Dipl.-Ing. 
Wagner & Geyer,Patentanwälte,Gewürzmühlstrasse 5
80538 München
80538 München (DE)

   


(54) ELECTROLYTIC PROCESSING APPARATUS AND METHOD