(19)
(11) EP 1 456 432 A1

(12)

(43) Date of publication:
15.09.2004 Bulletin 2004/38

(21) Application number: 02803641.6

(22) Date of filing: 15.11.2002
(51) International Patent Classification (IPC)7C23C 14/32
(86) International application number:
PCT/US2002/036788
(87) International publication number:
WO 2003/044240 (30.05.2003 Gazette 2003/22)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 15.11.2001 US 335689 P
01.05.2002 US 376893 P

(71) Applicant: Ionic Fusion Corporation
Longmont, CO 80501 (US)

(72) Inventors:
  • PETERSON, John H.,Ionic Fusion Corporation
    Longmont, CO 80501 (US)
  • PETERSON, John H.,Ionic Fusion Corporation
    Longmont, CO 80501 (US)

(74) Representative: McLeish, Nicholas Alistair Maxwell et al
Boult Wade TennantVerulam Gardens70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB)

   


(54) IONIC PLASMA DEPOSITION APPARATUS