MICRO-MECHANICAL INERTIAL SENSORS - Patent 1456673

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EP 1 456 673 A2

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(88)	Date of publication A3:
	21.05.2004

(43)	Date of publication:
	15.09.2004 Bulletin 2004/38

(21)	Application number: 00955912.1

(22)	Date of filing: 05.07.2000

(51)	International Patent Classification (IPC)⁷: G01P 15/08, G01P 15/125

(86)	International application number:
	PCT/US2000/040305

(87)	International publication number:
	WO 2001/009622 (08.02.2001 Gazette 2001/06)

(84)	Designated Contracting States:
	CH DE FI FR GB LI

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Priority:

30.07.1999 US 365336

(71)	Applicant: LITTON SYSTEMS, INC.
	Woodland Hills,California 91367-6675 (US)

(72)	Inventor:
	STEWART, Robert, E. Woodland Hills, CA 91364 (US)

(74)	Representative: Hoffmann, Jörg Peter, Dr. Ing.
	Müller Hoffmann & PartnerPatentanwälteInnere Wiener Strasse 17 81667 München 81667 München (DE)

(54)	MICRO-MECHANICAL INERTIAL SENSORS