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(11)

EP 1 458 904 A1

(12)

(43) Date of publication: 22.09.2004 Bulletin 2004/39 (21) Application number: 02756489.7 (22) Date of filing: 16.07.2002

(51) International Patent Classification (IPC)7: C23C 16/455, C23C 16/14 (86) International application number: PCT/US2002/022486 (87) International publication number: WO 2003/064724 (07.08.2003 Gazette 2003/32)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR (30) Priority: 17.12.2001 US 23125 12.07.2002 US 194442 12.07.2002 US 194629 (71) Applicant: Applied Materials, Inc. Santa Clara,California 95054 (US)	(72) Inventors: YOO, Jong, Hyun Milpitas, CA 95035 (US) LU, Xinliang Sunnyvale, CA 94086 (US) CHEN, Chiliang Sunnyvale, CA 94538 (US) LAI, Ken, K. Milpitas, CA 95035 (US) KAO, Chien-Teh Sunnyvale, CA 94086 (US) (74) Representative: Bayliss, Geoffrey Cyril et al BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)