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EP 1 468 443 A1

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(43) Date of publication: 20.10.2004 Bulletin 2004/43 (21) Application number: 03703985.6 (22) Date of filing: 23.01.2003

(51) International Patent Classification (IPC)7: H01L 21/02, G06K 19/077 (86) International application number: PCT/US2003/002115 (87) International publication number: WO 2003/063211 (31.07.2003 Gazette 2003/31)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR Designated Extension States: AL LT LV MK RO (30) Priority: 23.01.2002 US 56192 (71) Applicant: Alien Technology Corporation Morgan Hill, CA 95037 (US)

(72) Inventors: GENGEL, Glenn, W. Hollister, CA 95023 (US) HADLEY, Mark, A. Newark, CA 94560 (US) EISENHARDT, Randolph, W. Prunedale, CA 93907 (US) SWINDLEHURST, Susan Morgan Hill, CA 95037 (US) DRZAIC, Paul, S Morgan Hill, CA 95037 (US) VICENTINI, Frederick, J. Redwood City, CA 94063 (US) HEMINGWAY, John, Moon Morgan Hill, CA 95037 (US) (74) Representative: Jacoby, Georg et al Samson & Partner,Widenmayerstrasse 5 80538 München 80538 München (DE)