(19)
(11) EP 1 468 785 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
22.04.2015 Bulletin 2015/17

(45) Mention of the grant of the patent:
18.03.2015 Bulletin 2015/12

(21) Application number: 04008869.2

(22) Date of filing: 14.04.2004
(51) International Patent Classification (IPC): 
B24B 37/24(2012.01)
B24D 3/34(2006.01)
 B24D 18/00(2006.01)

(54)

Polishing pad and production method thereof

Polierkissen und Herstellungsverfahren desselben

Tampon de polissage et son procédé de fabrication

(84) Designated Contracting States:
DE FR IT

(30) Priority: 15.04.2003 JP 2003110853

(43) Date of publication of application:
20.10.2004 Bulletin 2004/43

(73) Proprietor: JSR Corporation
Tokyo 105-0021 (JP)

(72) Inventors:
  • Sakurai, Fujio
    Tokyo 105-0021 (JP)
  • Mihara, Iwao
    Tokyo 105-0021 (JP)
  • Igarashi, Yoshinori
    Tokyo 105-0021 (JP)
  • Hasegawa, Kou
    Tokyo 105-0021 (JP)

(74) Representative: TBK 
Bavariaring 4-6
80336 München
80336 München (DE)


(56) References cited: : 
EP-A- 0 192 047
 WO-A-02/083757
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).