METHOD AND ASSOCIATED APPARATUS FOR TILTING A SUBSTRATE UPON ENTRY FOR METAL DEPOSITION - Patent 1470268

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(11)

EP 1 470 268 A2

(12)

(88)	Date of publication A3:
	05.08.2004

(43)	Date of publication:
	27.10.2004 Bulletin 2004/44

(21)	Application number: 01979288.6

(22)	Date of filing: 26.09.2001

(51)	International Patent Classification (IPC)⁷: C25D 17/12

(86)	International application number:
	PCT/US2001/030058

(87)	International publication number:
	WO 2002/029137 (11.04.2002 Gazette 2002/15)

(84)	Designated Contracting States:
	AT BE CH CY DE FR GB IT LI NL

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Priority:

03.10.2000 US 678947

(71)	Applicant: Applied Materials, Inc.
	Santa Clara,California 95054 (US)

(72)	Inventors:
	DORDI, Yezdi, N. Palo Alto, CA 94303 (US) STEVENS, Joseph, J. San Jose, CA 95123 (US) SUGARMAN, Michael, N. San Francisco, CA 94117 (US)

(74)	Representative: Bayliss, Geoffrey Cyril et al
	BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)

(54)	METHOD AND ASSOCIATED APPARATUS FOR TILTING A SUBSTRATE UPON ENTRY FOR METAL DEPOSITION