| (84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR |
| (30) |
Priority: |
31.01.2002 JP 2002022734
15.04.2002 JP 2002112487
17.05.2002 JP 2002142411
12.06.2002 JP 2002172092
02.07.2002 JP 2002193776
|
| (71) |
Applicant: EBARA CORPORATION |
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Ohta-ku,Tokyo 144-8510 (JP) |
|
| (72) |
Inventors: |
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- SHIRAKASHI, Mitsuhiko,c/o Ebara Corporation
Ohta-ku, Tokyo 144-8510 (JP)
- KUMEKAWA, Masayuki,c/o Ebara Corporation
Ohta-ku, Tokyo 144-8510 (JP)
- YASUDA, Hozumi,c/o Ebara Corporation
Ohta-ku, Tokyo 144-8510 (JP)
- KOBATA, Itsuki,c/o Ebara Corporation
Ohta-ku, Tokyo 144-8510 (JP)
- NABEYA, Osamu,c/o Ebara Corporation
Ohta-ku, Tokyo 144-8510 (JP)
|
| (74) |
Representative: Wagner, Karl H., Dipl.-Ing. |
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WAGNER & GEYERPatentanwälteGewürzmühlstrasse 5
80538 München
80538 München (DE) |
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