(19)
(11)
EP 1 470 449 A1
(12)
(43)
Date of publication:
27.10.2004
Bulletin 2004/44
(21)
Application number:
03734657.4
(22)
Date of filing:
31.01.2003
(51)
International Patent Classification (IPC)
7
:
G03F
7/038
,
G03F
7/40
,
B01J
19/00
(86)
International application number:
PCT/DK2003/000062
(87)
International publication number:
WO 2003/065122
(
07.08.2003
Gazette 2003/32)
(84)
Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR
Designated Extension States:
AL LT LV MK RO
(30)
Priority:
31.01.2002
DK 200200157
(71)
Applicant:
Scandinavian Micro Biodevices A/S
2800 Lyngby (DK)
(72)
Inventors:
BARHOLM-HANSEN, Claus
DK-3500 Vaerloese (DK)
JONSMANN, Jacques
DK-3330 Goerloese (DK)
(74)
Representative:
Lee, Nicholas John et al
Kilburn & Strode,20 Red Lion Street
London WC1R 4PJ
London WC1R 4PJ (GB)
(54)
METHOD OF JOINING A WORKPIECE AND A MICROSTRUCTURE BY LIGHT EXPOSURE