(19)
(11) EP 1 470 449 A1

(12)

(43) Date of publication:
27.10.2004 Bulletin 2004/44

(21) Application number: 03734657.4

(22) Date of filing: 31.01.2003
(51) International Patent Classification (IPC)7G03F 7/038, G03F 7/40, B01J 19/00
(86) International application number:
PCT/DK2003/000062
(87) International publication number:
WO 2003/065122 (07.08.2003 Gazette 2003/32)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR
Designated Extension States:
AL LT LV MK RO

(30) Priority: 31.01.2002 DK 200200157

(71) Applicant: Scandinavian Micro Biodevices A/S
2800 Lyngby (DK)

(72) Inventors:
  • BARHOLM-HANSEN, Claus
    DK-3500 Vaerloese (DK)
  • JONSMANN, Jacques
    DK-3330 Goerloese (DK)

(74) Representative: Lee, Nicholas John et al
Kilburn & Strode,20 Red Lion Street
London WC1R 4PJ
London WC1R 4PJ (GB)

   


(54) METHOD OF JOINING A WORKPIECE AND A MICROSTRUCTURE BY LIGHT EXPOSURE