| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR |
|
Designated Extension States: |
|
AL LT LV MK RO |
| (30) |
Priority: |
01.02.2002 EP 02002429
|
| (71) |
Applicant: Carl Zeiss SMT AG |
|
73447 Oberkochen (DE) |
|
| (72) |
Inventors: |
|
- SINGER, Wolfgang
73431 Aalen (DE)
- ANTONI, Martin
73434 Aalen (DE)
- WANGLER, Johannes
89551 Königsbronn (DE)
- ESCUDERO SANZ, Isabel
NL-2600 AD Delft (NL)
|
| (74) |
Representative: Dr. Weitzel & Partner |
|
Friedenstrasse 10
89522 Heidenheim
89522 Heidenheim (DE) |
|
