SEMICONDUCTOR COMPONENT HANDLING DEVICE HAVING AN ELECTROSTATIC DISSIPATING FILM - Patent 1470570

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(11)

EP 1 470 570 A2

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(88)	Date of publication A3:
	11.12.2003

(43)	Date of publication:
	27.10.2004 Bulletin 2004/44

(21)	Application number: 02789916.0

(22)	Date of filing: 26.11.2002

(51)	International Patent Classification (IPC)⁷: H01L 21/00

(86)	International application number:
	PCT/US2002/038076

(87)	International publication number:
	WO 2003/046952 (05.06.2003 Gazette 2003/23)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

27.11.2001 US 333686 P

(71)	Applicant: Entegris, Inc.
	Chaska, MN 55318 (US)

(72)	Inventors:
	BHATT, Sanjiv, M. Minnetonka, MN 55345 (US) EGGUM, Shawn, D. Victoria, MN 55386 (US)

(74)	Representative: Geyer, Werner, Dr.-Ing. et al
	PatentanwälteGeyer, Fehners & PartnerPerhamerstrasse 31 80687 München 80687 München (DE)

(54)	SEMICONDUCTOR COMPONENT HANDLING DEVICE HAVING AN ELECTROSTATIC DISSIPATING FILM